分批式净化系统:
The original sealed structure has enabled the atmospheric process.
With the ultra high HEPA filter adopted,the maximum available temperature at 500℃ has been achieved.
Cycle time reduction is possible by oven rapid cooling system and/or speedy substrate-transfer.
Available glass size | | ~W730×L920mm |
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Temperature range | 80~500℃ |
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Temperature uniformity | ±5℃ |
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Cleanliness | Class 10 (0.3μm) |
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Applications | | A wide variety of Annealing of LTPS & TFT |
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